Acousto-optic scanning spatial-switching multiphoton lithography
Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years. Multiphoton lithography (MPL) is one of the most promising 3D nanomanufacturing technologies, which has been widely used in manufacturing micro-optics,...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2023-01-01
|
| Series: | International Journal of Extreme Manufacturing |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2631-7990/ace0a7 |