Studying accelerometers with capacitive sensing elements
This paper presents types and operating mode of vibration sensors. Differential capacitor sensing elements are often used in integrated accelerometers. It will be investigate the structure and transfer function of the seismic mass type sensing element. The article presents how the piezoelectric sens...
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| Format: | Article |
| Language: | English |
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Editura Universităţii "Petru Maior"
2011-12-01
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| Series: | Scientific Bulletin of the ''Petru Maior" University of Tîrgu Mureș |
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| Online Access: | http://scientificbulletin.upm.ro/papers/2011/12/%C3%81goston-Katalin-Studying-accelerometers-with-capacitive-sensing-elements.pdf |