High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector

High-Efficiency Grating Coupler in 400 nm and 500 nm PECVD Silicon Nitride With Bottom Reflector

We design and experimentally demonstrate highly efficient Silicon Nitride based grating couplers with bottom distributed Bragg reflectors. All the layers were deposited using plasma enhanced chemical vapor deposition processing. We present gratings on two Silicon Nitride thickness (400 nm and 500 nm...

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Bibliographic Details
Main Authors: Siddharth Nambiar, Abhai Kumar, Rakshitha Kallega, Praveen Ranganath, Shankar Kumar Selvaraja
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Photonics Journal
Subjects:
Grating couplers
silicon nitride
waveguides
Online Access:https://ieeexplore.ieee.org/document/8808907/

Internet

https://ieeexplore.ieee.org/document/8808907/

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