Research on temperature drift mechanism and compensation method of silicon piezoresistive pressure sensors
Silicon piezoresistive pressure sensors have played a key role in the detection field due to their small size, high sensitivity, and high integration. However, the factors such as its material particularity, the temperature dependence of the piezoresistive coefficient, the variation of carrier motio...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-03-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0135401 |