An Expandable Yield Prediction Framework Using Explainable Artificial Intelligence for Semiconductor Manufacturing
Enormous amounts of data are generated and analyzed in the latest semiconductor industry. Established yield prediction studies have dealt with one type of data or a dataset from one procedure. However, semiconductor device fabrication comprises hundreds of processes, and various factors affect devic...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-02-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/13/4/2660 |