An Expandable Yield Prediction Framework Using Explainable Artificial Intelligence for Semiconductor Manufacturing

An Expandable Yield Prediction Framework Using Explainable Artificial Intelligence for Semiconductor Manufacturing

Enormous amounts of data are generated and analyzed in the latest semiconductor industry. Established yield prediction studies have dealt with one type of data or a dataset from one procedure. However, semiconductor device fabrication comprises hundreds of processes, and various factors affect devic...

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Bibliographic Details
Main Authors:	Youjin Lee, Yonghan Roh
Format:	Article
Language:	English
Published:	MDPI AG 2023-02-01
Series:	Applied Sciences
Subjects:	semiconductor manufacturing yield prediction XAI SHAP value method
Online Access:	https://www.mdpi.com/2076-3417/13/4/2660

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