Comprehensive Design Method of a High-Frequency-Response Fast Tool Servo System Based on a Full-Frequency Error Control Algorithm

Comprehensive Design Method of a High-Frequency-Response Fast Tool Servo System Based on a Full-Frequency Error Control Algorithm

With the development of optoelectronic information technology, high-performance optical systems require an increasingly higher surface accuracy of optical mirrors. The fast tool servo (FTS) based on the piezoelectric actuator is widely used in the compensation machining of high-precision optical mir...

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Bibliographic Details
Main Authors: Zelong Li, Chaoliang Guan, Yifan Dai, Shuai Xue, Lianmin Yin
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Micromachines
Subjects:
fast tool servo
piezoelectric actuator
Prandtl–Ishlinskii hysteresis model
feedforward compensator
zero phase error control
Online Access:https://www.mdpi.com/2072-666X/12/11/1354

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https://www.mdpi.com/2072-666X/12/11/1354

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