Comprehensive Design Method of a High-Frequency-Response Fast Tool Servo System Based on a Full-Frequency Error Control Algorithm
With the development of optoelectronic information technology, high-performance optical systems require an increasingly higher surface accuracy of optical mirrors. The fast tool servo (FTS) based on the piezoelectric actuator is widely used in the compensation machining of high-precision optical mir...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/11/1354 |