Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes

Influence of Deposition Modes and Thermal Annealing on Residual Stresses in Magnetron-Sputtered YSZ Membranes

Thin-film electrolyte made of 8-mol% yttria stabilized zirconia (8YSZ) for solid oxide fuel cells (SOFCs) was fabricated on anode substrates using reactive magnetron sputtering of Zr-Y targets in a mixture of Ar and O<sub>2</sub> gases. The deposition of 4–6 µm thin-film electrolyte was...

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Bibliographic Details
Main Authors: Andrey Solovyev, Sergey Rabotkin, Anna Shipilova, Dmitrii Agarkov, Ilya Burmistrov, Alexander Shmakov
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Membranes
Subjects:
solid oxide fuel cell
yttria-stabilized zirconia
electrolyte
residual stress
high temperature annealing
Online Access:https://www.mdpi.com/2077-0375/12/3/346

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https://www.mdpi.com/2077-0375/12/3/346

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