A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions

Abstract We show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. The reconstructions employ x-ray computed tomography, measured with a new and innovative high-magnification x-ray microscope. The instrument uses a focused electron beam to generate...

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Bibliographic Details
Main Authors: Zachary H. Levine, Bradley K. Alpert, Amber L. Dagel, Joseph W. Fowler, Edward S. Jimenez, Nathan Nakamura, Daniel S. Swetz, Paul Szypryt, Kyle R. Thompson, Joel N. Ullom
Format: Article
Language:English
Published: Nature Publishing Group 2023-04-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-023-00510-6

Internet

https://doi.org/10.1038/s41378-023-00510-6

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