Passivation Effect on ZnO Films by SF<sub>6</sub> Plasma Treatment
The passivation effects of SF<sub>6</sub> plasma on zinc oxide (ZnO) films prepared by magnetron sputtering were researched. After the SF<sub>6</sub> plasma passivation of ZnO films, the grain size increases, there is low surface roughness, and a small amount of Zn-F bonds ar...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-05-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/9/5/236 |