Passivation Effect on ZnO Films by SF<sub>6</sub> Plasma Treatment

Passivation Effect on ZnO Films by SF<sub>6</sub> Plasma Treatment

The passivation effects of SF<sub>6</sub> plasma on zinc oxide (ZnO) films prepared by magnetron sputtering were researched. After the SF<sub>6</sub> plasma passivation of ZnO films, the grain size increases, there is low surface roughness, and a small amount of Zn-F bonds ar...

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Bibliographic Details
Main Authors: Yumeng Xu, Baoxue Bo, Xin Gao, Zhongliang Qiao
Format: Article
Language:English
Published: MDPI AG 2019-05-01
Series:Crystals
Subjects:
ZnO
SF<sub>6</sub>
passivation
Online Access:https://www.mdpi.com/2073-4352/9/5/236

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