FDTD-Based Study on Equivalent Medium Approximation Model of Surface Roughness for Thin Films Characterization Using Spectroscopic Ellipsometry
Spectroscopic ellipsometry (SE) is an effective method to measure the optical constants of thin film materials which is very sensitive to the surface topography of thin films. When performing ellipsometric measurements of the optical constants of solid materials with rough surfaces, the equivalent m...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-08-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/9/9/621 |