Measurement of micropore by resonant probe with microsphere
A micro–nano coordinate measuring machine (CMM) is an instrument for high-precision measurement of micro-precision parts. The top of its probe is a microsphere with a diameter of tens to hundreds of micrometres. When the probe microsphere touches the part for measurement, its accuracy is affected by...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0170116 |