Design of a linear macro–micro actuation stage considering vibration isolation
In microelectronics manufacturing, macro–micro actuation stages are typically applied to obtain a high-precision positioning at a high acceleration. Macro–micro actuation stage comprises a voice coil motor that achieves a high-acceleration motion and a piezoelectric stack actuator which realizes nan...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2015-05-01
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| Series: | Advances in Mechanical Engineering |
| Online Access: | https://doi.org/10.1177/1687814015584541 |