A Flexible Film Bulk Acoustic Resonator Based on β-Phase Polyvinylidene Fluoride Polymer
This paper reports a novel flexible film bulk acoustic resonator (FBAR) based on <inline-formula> <math display="inline"> <semantics> <mi mathvariant="sans-serif">β</mi> </semantics> </math> </inline-formula>-phase polyviny...
| Main Authors: | , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/5/1346 |