Single-shot, coherent, pop-out 3D metrology

Abstract Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. However, capturing ima...

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Bibliographic Details
Main Authors: Deepan Balakrishnan, See Wee Chee, Zhaslan Baraissov, Michel Bosman, Utkur Mirsaidov, N. Duane Loh
Format: Article
Language:English
Published: Nature Portfolio 2023-11-01
Series:Communications Physics
Online Access:https://doi.org/10.1038/s42005-023-01431-6