Single-shot, coherent, pop-out 3D metrology
Abstract Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. However, capturing ima...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2023-11-01
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| Series: | Communications Physics |
| Online Access: | https://doi.org/10.1038/s42005-023-01431-6 |
| _version_ | 1797636844290048000 |
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| author | Deepan Balakrishnan See Wee Chee Zhaslan Baraissov Michel Bosman Utkur Mirsaidov N. Duane Loh |
| author_facet | Deepan Balakrishnan See Wee Chee Zhaslan Baraissov Michel Bosman Utkur Mirsaidov N. Duane Loh |
| author_sort | Deepan Balakrishnan |
| collection | DOAJ |
| description | Abstract Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. However, capturing images at higher tilt angles is infeasible for such thin, extended specimens. Here, we explore a suitable alternative to reconstruct the 3D volume using a single, energy-filtered, bright-field coherent image. We show that when our specimen is homogeneous and amorphous, simultaneously inferring local depth and thickness for 3D imaging is possible in the near-field limit. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles. |
| first_indexed | 2024-03-11T12:41:05Z |
| format | Article |
| id | doaj.art-cdad1fa7f5954e2597ada6725a169056 |
| institution | Directory Open Access Journal |
| issn | 2399-3650 |
| language | English |
| last_indexed | 2024-03-11T12:41:05Z |
| publishDate | 2023-11-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Communications Physics |
| spelling | doaj.art-cdad1fa7f5954e2597ada6725a1690562023-11-05T12:20:40ZengNature PortfolioCommunications Physics2399-36502023-11-016111510.1038/s42005-023-01431-6Single-shot, coherent, pop-out 3D metrologyDeepan Balakrishnan0See Wee Chee1Zhaslan Baraissov2Michel Bosman3Utkur Mirsaidov4N. Duane Loh5Centre for Bio-Imaging Sciences, National University of SingaporeCentre for Bio-Imaging Sciences, National University of SingaporeCentre for Bio-Imaging Sciences, National University of SingaporeDepartment of Materials Science and Engineering, National University of SingaporeCentre for Bio-Imaging Sciences, National University of SingaporeCentre for Bio-Imaging Sciences, National University of SingaporeAbstract Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. However, capturing images at higher tilt angles is infeasible for such thin, extended specimens. Here, we explore a suitable alternative to reconstruct the 3D volume using a single, energy-filtered, bright-field coherent image. We show that when our specimen is homogeneous and amorphous, simultaneously inferring local depth and thickness for 3D imaging is possible in the near-field limit. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles.https://doi.org/10.1038/s42005-023-01431-6 |
| spellingShingle | Deepan Balakrishnan See Wee Chee Zhaslan Baraissov Michel Bosman Utkur Mirsaidov N. Duane Loh Single-shot, coherent, pop-out 3D metrology Communications Physics |
| title | Single-shot, coherent, pop-out 3D metrology |
| title_full | Single-shot, coherent, pop-out 3D metrology |
| title_fullStr | Single-shot, coherent, pop-out 3D metrology |
| title_full_unstemmed | Single-shot, coherent, pop-out 3D metrology |
| title_short | Single-shot, coherent, pop-out 3D metrology |
| title_sort | single shot coherent pop out 3d metrology |
| url | https://doi.org/10.1038/s42005-023-01431-6 |
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