Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials
The reactions that can occur on organic materials treated in plasma enviorement are strongly affected by surface temperature, thus the sharp determination of this variable is extremely important to process control. In situ temperature measurements are often employed; however, the measured point is g...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)
2017-08-01
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| Series: | Materials Research |
| Subjects: | |
| Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392017000501432&tlng=en |