Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials
The reactions that can occur on organic materials treated in plasma enviorement are strongly affected by surface temperature, thus the sharp determination of this variable is extremely important to process control. In situ temperature measurements are often employed; however, the measured point is g...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)
2017-08-01
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| Series: | Materials Research |
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| Online Access: | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392017000501432&tlng=en |
| _version_ | 1819005933253033984 |
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| author | Carlos Eduardo Farias Euclides Alexandre Bernardelli Paulo Cesar Borges Márcio Mafra |
| author_facet | Carlos Eduardo Farias Euclides Alexandre Bernardelli Paulo Cesar Borges Márcio Mafra |
| author_sort | Carlos Eduardo Farias |
| collection | DOAJ |
| description | The reactions that can occur on organic materials treated in plasma enviorement are strongly affected by surface temperature, thus the sharp determination of this variable is extremely important to process control. In situ temperature measurements are often employed; however, the measured point is generally under the treated surface. If in metallic materials the high thermal conductivity minimizes this problem, in non-metallic materials processing it becomes important, because its thermal resistivity besides a high sensibility to small temperature variations. The present work uses a simulation tool to extract thermal data on Ar+O2 RF plasma processing of Stearic Acid. Experimental data were obtained by thermocouples placed inside the samples. The extrapolation of surface temperature was performed by numerical simulation with Autodesk CFD software v.15.1. Results show that the temperature of the surface reaches values higher than the ones measured inside the sample holder. This difference of temperature is in good agreement with the visual observation of the phase transformations in the treated material, showing a simple and valuable tool to better control of plasma treatments. |
| first_indexed | 2024-12-21T00:00:39Z |
| format | Article |
| id | doaj.art-cdafd16a03da4487852ecbfc1a7021f4 |
| institution | Directory Open Access Journal |
| issn | 1516-1439 |
| language | English |
| last_indexed | 2024-12-21T00:00:39Z |
| publishDate | 2017-08-01 |
| publisher | Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) |
| record_format | Article |
| series | Materials Research |
| spelling | doaj.art-cdafd16a03da4487852ecbfc1a7021f42022-12-21T19:22:37ZengAssociação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol)Materials Research1516-14392017-08-012051432144310.1590/1980-5373-mr-2017-0238Determination of Surface Temperature in ICP RF Plasma Treatments of Organic MaterialsCarlos Eduardo FariasEuclides Alexandre BernardelliPaulo Cesar BorgesMárcio MafraThe reactions that can occur on organic materials treated in plasma enviorement are strongly affected by surface temperature, thus the sharp determination of this variable is extremely important to process control. In situ temperature measurements are often employed; however, the measured point is generally under the treated surface. If in metallic materials the high thermal conductivity minimizes this problem, in non-metallic materials processing it becomes important, because its thermal resistivity besides a high sensibility to small temperature variations. The present work uses a simulation tool to extract thermal data on Ar+O2 RF plasma processing of Stearic Acid. Experimental data were obtained by thermocouples placed inside the samples. The extrapolation of surface temperature was performed by numerical simulation with Autodesk CFD software v.15.1. Results show that the temperature of the surface reaches values higher than the ones measured inside the sample holder. This difference of temperature is in good agreement with the visual observation of the phase transformations in the treated material, showing a simple and valuable tool to better control of plasma treatments.http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392017000501432&tlng=enUltimate surface temperatureRF plasma treatmentTemperature simulation |
| spellingShingle | Carlos Eduardo Farias Euclides Alexandre Bernardelli Paulo Cesar Borges Márcio Mafra Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials Materials Research Ultimate surface temperature RF plasma treatment Temperature simulation |
| title | Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials |
| title_full | Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials |
| title_fullStr | Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials |
| title_full_unstemmed | Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials |
| title_short | Determination of Surface Temperature in ICP RF Plasma Treatments of Organic Materials |
| title_sort | determination of surface temperature in icp rf plasma treatments of organic materials |
| topic | Ultimate surface temperature RF plasma treatment Temperature simulation |
| url | http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392017000501432&tlng=en |
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