Multiscale design and application of low adhesion strength DLC release layer

Multiscale design and application of low adhesion strength DLC release layer

In several disciplines, such as X-ray astronomy, synchrotron radiation facilities, X-ray microscopy, and X-ray lithograph, X-ray-focusing mirrors are crucial parts. They make it possible for scientists and researchers to execute cutting-edge nanoscale imaging techniques, analyze the structure and pr...

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Bibliographic Details
Main Authors: Qiuyan Liao, Bo Wang, Fei Ding, Duo Li, Wenyu Liu, Lei Wang, Yanji Yang, Yong Chen
Format: Article
Language:English
Published: Elsevier 2023-09-01
Series:Journal of Materials Research and Technology
Subjects:
Adhesion strength
Interface diffusion
Diamond-like carbon (DLC)
Density functional theory (DFT)
Molecule dynamic simulation
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785423023736

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http://www.sciencedirect.com/science/article/pii/S2238785423023736

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