Multiscale design and application of low adhesion strength DLC release layer

In several disciplines, such as X-ray astronomy, synchrotron radiation facilities, X-ray microscopy, and X-ray lithograph, X-ray-focusing mirrors are crucial parts. They make it possible for scientists and researchers to execute cutting-edge nanoscale imaging techniques, analyze the structure and pr...

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Main Authors: Qiuyan Liao, Bo Wang, Fei Ding, Duo Li, Wenyu Liu, Lei Wang, Yanji Yang, Yong Chen
Format: Article
Language:English
Published: Elsevier 2023-09-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785423023736
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author Qiuyan Liao
Bo Wang
Fei Ding
Duo Li
Wenyu Liu
Lei Wang
Yanji Yang
Yong Chen
author_facet Qiuyan Liao
Bo Wang
Fei Ding
Duo Li
Wenyu Liu
Lei Wang
Yanji Yang
Yong Chen
author_sort Qiuyan Liao
collection DOAJ
description In several disciplines, such as X-ray astronomy, synchrotron radiation facilities, X-ray microscopy, and X-ray lithograph, X-ray-focusing mirrors are crucial parts. They make it possible for scientists and researchers to execute cutting-edge nanoscale imaging techniques, analyze the structure and properties of materials, and explore the cosmos. However, controlling deformation during the manufacturing process is crucial to ensure the production of high-quality components. The strong bonding force of the film is one of the primary causes of mirror distortion while making X-ray-focusing mirrors. As a release layer, diamond-like carbon (DLC) was coated between Au and NiP alloy to lessen distortion during the demolding process for X-ray optic mirrors. In this investigation, we first used density functional theory (DFT) simulation to determine the binding energies of NiP–Au and C–Au. The interactions were then observed by high resolution transmission electron microscopy and scanning transmission electron microscopy. When Au is deposited at low energy and room temperature on a NiP substrate, the phenomena of diffusion layer creation at the interface can be seen for the first time in direct observation. The 6.8 nm diffusion layer between Au and NiP, which causes the high binding energy, is primarily responsible for the increased adhesion strength. Molecular dynamic simulation and tensile testing were used to compute and assess the adhesion strength. According to the findings, Au–C's adhesion strength was 96.4% lower than Au–NiP's. After the DLC release layer was introduced, the deformation of mirror shape as measured by a spot measurement method of optical performance significantly improved. In addition, we created and successfully implemented the 20 nm DLC release layer for the project.
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spelling doaj.art-cdc08b89dee340e6a49bbbfd42b075452023-10-30T06:05:01ZengElsevierJournal of Materials Research and Technology2238-78542023-09-012695189531Multiscale design and application of low adhesion strength DLC release layerQiuyan Liao0Bo Wang1Fei Ding2Duo Li3Wenyu Liu4Lei Wang5Yanji Yang6Yong Chen7School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, China; Corresponding author.School of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Mechanical Engineering, Harbin Institute of Technology, Harbin 150001, ChinaState Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Chemical Engineering and Chemistry, Harbin Institute of Technology, Harbin 150001, ChinaKey Laboratory for Particle Astro, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 10049, ChinaKey Laboratory for Particle Astro, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 10049, ChinaIn several disciplines, such as X-ray astronomy, synchrotron radiation facilities, X-ray microscopy, and X-ray lithograph, X-ray-focusing mirrors are crucial parts. They make it possible for scientists and researchers to execute cutting-edge nanoscale imaging techniques, analyze the structure and properties of materials, and explore the cosmos. However, controlling deformation during the manufacturing process is crucial to ensure the production of high-quality components. The strong bonding force of the film is one of the primary causes of mirror distortion while making X-ray-focusing mirrors. As a release layer, diamond-like carbon (DLC) was coated between Au and NiP alloy to lessen distortion during the demolding process for X-ray optic mirrors. In this investigation, we first used density functional theory (DFT) simulation to determine the binding energies of NiP–Au and C–Au. The interactions were then observed by high resolution transmission electron microscopy and scanning transmission electron microscopy. When Au is deposited at low energy and room temperature on a NiP substrate, the phenomena of diffusion layer creation at the interface can be seen for the first time in direct observation. The 6.8 nm diffusion layer between Au and NiP, which causes the high binding energy, is primarily responsible for the increased adhesion strength. Molecular dynamic simulation and tensile testing were used to compute and assess the adhesion strength. According to the findings, Au–C's adhesion strength was 96.4% lower than Au–NiP's. After the DLC release layer was introduced, the deformation of mirror shape as measured by a spot measurement method of optical performance significantly improved. In addition, we created and successfully implemented the 20 nm DLC release layer for the project.http://www.sciencedirect.com/science/article/pii/S2238785423023736Adhesion strengthInterface diffusionDiamond-like carbon (DLC)Density functional theory (DFT)Molecule dynamic simulation
spellingShingle Qiuyan Liao
Bo Wang
Fei Ding
Duo Li
Wenyu Liu
Lei Wang
Yanji Yang
Yong Chen
Multiscale design and application of low adhesion strength DLC release layer
Journal of Materials Research and Technology
Adhesion strength
Interface diffusion
Diamond-like carbon (DLC)
Density functional theory (DFT)
Molecule dynamic simulation
title Multiscale design and application of low adhesion strength DLC release layer
title_full Multiscale design and application of low adhesion strength DLC release layer
title_fullStr Multiscale design and application of low adhesion strength DLC release layer
title_full_unstemmed Multiscale design and application of low adhesion strength DLC release layer
title_short Multiscale design and application of low adhesion strength DLC release layer
title_sort multiscale design and application of low adhesion strength dlc release layer
topic Adhesion strength
Interface diffusion
Diamond-like carbon (DLC)
Density functional theory (DFT)
Molecule dynamic simulation
url http://www.sciencedirect.com/science/article/pii/S2238785423023736
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