Enhancement of Electrical Properties of Sol–Gel Indium–Tin–Oxide Films by Microwave Irradiation and Plasma Treatment

Enhancement of Electrical Properties of Sol–Gel Indium–Tin–Oxide Films by Microwave Irradiation and Plasma Treatment

We proposed the enhancement of the electrical properties of solution-processed indium–tin–oxide (ITO) thin films through microwave irradiation (MWI) and argon (Ar) gas plasma treatment. A cost- and time-effective heat treatment through MWI was applied as a post-deposition annealing (PDA) process to...

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Bibliographic Details
Main Authors: Sung-Hun Kim, Won-Ju Cho
Format: Article
Language:English
Published: MDPI AG 2021-09-01
Series:Micromachines
Subjects:
sol–gel indium–tin–oxide film
microwave irradiation
plasma treatment
ion bombardment
Online Access:https://www.mdpi.com/2072-666X/12/10/1167

Internet

https://www.mdpi.com/2072-666X/12/10/1167

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