Light-Sensing Properties of Amorphous Vanadium Oxide Films Prepared by RF Sputtering

Light-Sensing Properties of Amorphous Vanadium Oxide Films Prepared by RF Sputtering

In this study we analyzed the structure and light-sensing properties of as-deposited vanadium oxide thin films, prepared by RF sputtering in different Ar:O<sub>2</sub> flow rate conditions, at low temperature (e.g., 65 °C). X-ray diffraction (XRD), Scanning Electron Microscopy (SEM-EDX),...

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Bibliographic Details
Main Authors: Rodica Plugaru, Iuliana Mihalache, Cosmin Romaniţan, Florin Comanescu, Silviu Vulpe, Gabriel Craciun, Neculai Plugaru, Nikolay Djourelov
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Sensors
Subjects:
light-sensing
vanadium oxide
RF sputtering
Online Access:https://www.mdpi.com/1424-8220/23/4/1759

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https://www.mdpi.com/1424-8220/23/4/1759

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