A Novel Large Travel, High Precision MEMS Based Electro-thermal Linear Actuator for Adjusting CCD Camera Lens
In this paper, a linear micro actuator (LMA) with a stroke of 2.1 μm is designed and presented. Substrate, springy slider, and stopper are main parts of the LMA proposed. A large travel range can be achieved, by repeating the generated strokes. All simulations are done with ANSYS finite element. T...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2024-02-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/february_2024/Vol_264/p_3325.pdf |