Investigation of the electrostatic focusing of beams of electrosprayed nanodroplets for microfabrication applications
This article presents a focused electrospray beam source and discusses its potential for microfabrication. Its main elements are an electrospray emitter electrode (a point source of charged nanodroplets), an extractor electrode, a skimmer electrode, and an Einzel electrostatic lens. The focusing par...
| Главные авторы: | , |
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| Формат: | Статья |
| Язык: | English |
| Опубликовано: |
AIP Publishing LLC
2019-12-01
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| Серии: | AIP Advances |
| Online-ссылка: | http://dx.doi.org/10.1063/1.5128113 |