Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System
In order to get the precision linear motion output，a piezoelectric flexible micro drive system that composed of piezoelectric actuators and flexible micro mechanism is designed，and the system has sub-micron positioning accuracy driven by piezoelectric actuator. A kind of precise flexible micro mecha...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Transmission
2020-01-01
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| Series: | Jixie chuandong |
| Subjects: | |
| Online Access: | http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.2020.06.012 |