Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System
In order to get the precision linear motion output，a piezoelectric flexible micro drive system that composed of piezoelectric actuators and flexible micro mechanism is designed，and the system has sub-micron positioning accuracy driven by piezoelectric actuator. A kind of precise flexible micro mecha...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Transmission
2020-06-01
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| Series: | Jixie chuandong |
| Subjects: | |
| Online Access: | http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.2020.06.012 |
| _version_ | 1826881629057974272 |
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| author | Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu |
| author_facet | Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu |
| author_sort | Zhang Chuanwei |
| collection | DOAJ |
| description | In order to get the precision linear motion output，a piezoelectric flexible micro drive system that composed of piezoelectric actuators and flexible micro mechanism is designed，and the system has sub-micron positioning accuracy driven by piezoelectric actuator. A kind of precise flexible micro mechanism is designed based on the principle of flexible hinge guide and transmission，and on this basis， a design scheme of piezoelectric flexible micro drive system is proposed. The kinematics analysis，strength analysis and dynamic analysis of the system are accomplished by the finite element method. The analysis results show that the system has the advantages such as high positioning accuracy which the maximum positioning error is 0.24 μm，good strength performance and excellent dynamic performance. This study has a certain reference value for the research and application of micro drive system. |
| first_indexed | 2024-03-13T09:16:35Z |
| format | Article |
| id | doaj.art-ce737d11604d40a882a2e7d39d6d3c58 |
| institution | Directory Open Access Journal |
| issn | 1004-2539 |
| language | zho |
| last_indexed | 2025-02-17T02:48:32Z |
| publishDate | 2020-06-01 |
| publisher | Editorial Office of Journal of Mechanical Transmission |
| record_format | Article |
| series | Jixie chuandong |
| spelling | doaj.art-ce737d11604d40a882a2e7d39d6d3c582025-01-10T14:44:54ZzhoEditorial Office of Journal of Mechanical TransmissionJixie chuandong1004-25392020-06-0144687231443602Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive SystemZhang ChuanweiLi NiuniuYang ManzhiGuo WeiXu KejunGe HongyuIn order to get the precision linear motion output，a piezoelectric flexible micro drive system that composed of piezoelectric actuators and flexible micro mechanism is designed，and the system has sub-micron positioning accuracy driven by piezoelectric actuator. A kind of precise flexible micro mechanism is designed based on the principle of flexible hinge guide and transmission，and on this basis， a design scheme of piezoelectric flexible micro drive system is proposed. The kinematics analysis，strength analysis and dynamic analysis of the system are accomplished by the finite element method. The analysis results show that the system has the advantages such as high positioning accuracy which the maximum positioning error is 0.24 μm，good strength performance and excellent dynamic performance. This study has a certain reference value for the research and application of micro drive system.http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.2020.06.012Sub-micron |
| spellingShingle | Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System Jixie chuandong Sub-micron |
| title | Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System |
| title_full | Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System |
| title_fullStr | Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System |
| title_full_unstemmed | Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System |
| title_short | Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System |
| title_sort | design and performance analysis of a sub micron piezoelectric flexible micro drive system |
| topic | Sub-micron |
| url | http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.2020.06.012 |
| work_keys_str_mv | AT zhangchuanwei designandperformanceanalysisofasubmicronpiezoelectricflexiblemicrodrivesystem AT liniuniu designandperformanceanalysisofasubmicronpiezoelectricflexiblemicrodrivesystem AT yangmanzhi designandperformanceanalysisofasubmicronpiezoelectricflexiblemicrodrivesystem AT guowei designandperformanceanalysisofasubmicronpiezoelectricflexiblemicrodrivesystem AT xukejun designandperformanceanalysisofasubmicronpiezoelectricflexiblemicrodrivesystem AT gehongyu designandperformanceanalysisofasubmicronpiezoelectricflexiblemicrodrivesystem |