Design and Growth of Low Resistivity P-Type AlGaN Superlattice Structure

This work investigated the impact of periodic thickness and doping region on the doping efficiency of the P-type AlGaN superlattice. In this paper, the band structure of the simulated superlattice was analyzed. The superlattice structure of Al<sub>0.1</sub>Ga<sub>0.3</sub>N/A...

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Bibliographic Details
Main Authors: Yang Liu, Xiaowei Zhou, Peixian Li, Bo Yang, Zhuang Zhao
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/15/5/596