Precision Compensation Control of a Piezo-Scanning Mechanism
In this study, a controller based on two compensators is developed to support a two-axis piezo-scanning mechanism for tracking control. The hysteresis compensator is designed based on a Prandtl–Ishlinskii hysteresis model in order to reduce the nonlinear hysteresis effect of a piezoelectric actuator...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2022-07-01
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| Series: | Frontiers in Materials |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fmats.2022.852642/full |