Precision Compensation Control of a Piezo-Scanning Mechanism

Precision Compensation Control of a Piezo-Scanning Mechanism

In this study, a controller based on two compensators is developed to support a two-axis piezo-scanning mechanism for tracking control. The hysteresis compensator is designed based on a Prandtl–Ishlinskii hysteresis model in order to reduce the nonlinear hysteresis effect of a piezoelectric actuator...

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Bibliographic Details
Main Authors:	Shuxin Liu, Huhai Jiang, Xiaohong Huang, Junchao She, Chen Si, Shengqiang Lv
Format:	Article
Language:	English
Published:	Frontiers Media S.A. 2022-07-01
Series:	Frontiers in Materials
Subjects:	piezo-scanning mechanism neural network uncertainty observer hysteresis compensation control
Online Access:	https://www.frontiersin.org/articles/10.3389/fmats.2022.852642/full

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