Effect of Si3N4 substrate surface roughness on the wear resistance of diamond film prepared by HFCVD
Diamond films were prepared by hot wire chemical vapour deposition on silicon nitride substrates with different surface roughness, and their properties were examined and analysed. The surface morphology of the crystallised silicon nitride substrates and the prepared diamond films were examined using...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2023-10-01
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| Series: | Jin'gangshi yu moliao moju gongcheng |
| Subjects: | |
| Online Access: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0184 |