The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT

The breakdown performance of the AlGaN/GaN high electron mobility transistor (HEMT) is limited by the high electric field peaks in the device. To obtain a more uniform electric field distribution, the drift region width modulation (DWM) technique is proposed to reshape the charge distribution betwee...

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Main Authors: Jianhua Liu, Jun Zhang, Jiafei Yao, Man Li, Jing Chen, Maolin Zhang, Xiaoming Huang, Chenyang Huang, Weihua Tang, Yufeng Guo
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9932885/
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author Jianhua Liu
Jun Zhang
Jiafei Yao
Man Li
Jing Chen
Maolin Zhang
Xiaoming Huang
Chenyang Huang
Weihua Tang
Yufeng Guo
author_facet Jianhua Liu
Jun Zhang
Jiafei Yao
Man Li
Jing Chen
Maolin Zhang
Xiaoming Huang
Chenyang Huang
Weihua Tang
Yufeng Guo
author_sort Jianhua Liu
collection DOAJ
description The breakdown performance of the AlGaN/GaN high electron mobility transistor (HEMT) is limited by the high electric field peaks in the device. To obtain a more uniform electric field distribution, the drift region width modulation (DWM) technique is proposed to reshape the charge distribution between the gate and drain electrodes. By applying the Gaussian box method, an effective designing guidance for the structure optimization of the AlGaN/GaN HEMT with adaptive-width drift region pillars (AWD-HEMT) is obtained. The fabricated AWD-HEMT demonstrated a significant improvement in breakdown performance. The Baliga’s figure of merit (BFOM) of AWD-HEMT improved 65.3% compared with the conventional HEMT, without introducing complicated processes. In addition, the mechanism of the AWD-HEMT is explored by numerical methods. The simulations indicate that a more uniform electric field distribution at AlGaN/GaN interfaces could be obtained, and the increased varying rate of the adaptive-width drift region (AWD) pillars results in a more obvious electric field modulation effect.
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spelling doaj.art-cec2166182ed423abe5fab18d60bc6162022-12-22T04:11:58ZengIEEEIEEE Journal of the Electron Devices Society2168-67342022-01-011098398810.1109/JEDS.2022.32180029932885The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMTJianhua Liu0https://orcid.org/0000-0002-7290-328XJun Zhang1https://orcid.org/0000-0002-5688-295XJiafei Yao2https://orcid.org/0000-0002-1469-0677Man Li3Jing Chen4https://orcid.org/0000-0001-9008-3556Maolin Zhang5https://orcid.org/0000-0002-3388-4442Xiaoming Huang6https://orcid.org/0000-0002-2238-1014Chenyang Huang7https://orcid.org/0000-0003-0990-6047Weihua Tang8https://orcid.org/0000-0002-8771-3120Yufeng Guo9https://orcid.org/0000-0002-1490-986XCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaCollege of Integrated Circuit Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing, ChinaThe breakdown performance of the AlGaN/GaN high electron mobility transistor (HEMT) is limited by the high electric field peaks in the device. To obtain a more uniform electric field distribution, the drift region width modulation (DWM) technique is proposed to reshape the charge distribution between the gate and drain electrodes. By applying the Gaussian box method, an effective designing guidance for the structure optimization of the AlGaN/GaN HEMT with adaptive-width drift region pillars (AWD-HEMT) is obtained. The fabricated AWD-HEMT demonstrated a significant improvement in breakdown performance. The Baliga’s figure of merit (BFOM) of AWD-HEMT improved 65.3% compared with the conventional HEMT, without introducing complicated processes. In addition, the mechanism of the AWD-HEMT is explored by numerical methods. The simulations indicate that a more uniform electric field distribution at AlGaN/GaN interfaces could be obtained, and the increased varying rate of the adaptive-width drift region (AWD) pillars results in a more obvious electric field modulation effect.https://ieeexplore.ieee.org/document/9932885/Electric fieldbreakdown voltageadaptive-width drift region pillarAlGaN/GaN HEMT
spellingShingle Jianhua Liu
Jun Zhang
Jiafei Yao
Man Li
Jing Chen
Maolin Zhang
Xiaoming Huang
Chenyang Huang
Weihua Tang
Yufeng Guo
The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT
IEEE Journal of the Electron Devices Society
Electric field
breakdown voltage
adaptive-width drift region pillar
AlGaN/GaN HEMT
title The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT
title_full The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT
title_fullStr The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT
title_full_unstemmed The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT
title_short The Drift Region Width Modulation Technique for Breakdown Performance Enhancement of AlGaN/GaN HEMT
title_sort drift region width modulation technique for breakdown performance enhancement of algan gan hemt
topic Electric field
breakdown voltage
adaptive-width drift region pillar
AlGaN/GaN HEMT
url https://ieeexplore.ieee.org/document/9932885/
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