Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing

Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing

This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers (SAMs) are coated on the microcantilevers&am...

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Bibliographic Details
Main Authors: Jiushuai Xu, Maik Bertke, Xuejing Li, Andi Setiono, Michael Fahrbach, Angelika Schmidt, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
microcantilever
ZnO nanorods
Chitosan SAMs
humidity sensing
Online Access:https://www.mdpi.com/2504-3900/2/13/838

Internet

https://www.mdpi.com/2504-3900/2/13/838

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