Performance Optimization of FD-SOI Hall Sensors Via 3D TCAD Simulations

This work investigates the behavior of fully depleted silicon-on-insulator (FD-SOI) Hall sensors with an emphasis on their physical parameters, namely the aspect ratio, doping concentration, and thicknesses. Via 3D-technology computer aided design (TCAD) simulations with a galvanomagnetic transport...

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Bibliographic Details
Main Authors: Linjie Fan, Jinshun Bi, Kai Xi, Sandip Majumdar, Bo Li
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/10/2751