Wearable Multi-Channel Pulse Signal Acquisition System Based on Flexible MEMS Sensor Arrays with TSV Structure
Micro-electro-mechanical system (MEMS) pressure sensors play a significant role in pulse wave acquisition. However, existing MEMS pulse pressure sensors bound with a flexible substrate by gold wire are vulnerable to crush fractures, leading to sensor failure. Additionally, establishing an effective...
| Հիմնական հեղինակներ: | , , , , , , , , |
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| Ձևաչափ: | Հոդված |
| Լեզու: | English |
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MDPI AG
2023-05-01
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| Շարք: | Biomimetics |
| Խորագրեր: | |
| Առցանց հասանելիություն: | https://www.mdpi.com/2313-7673/8/2/207 |