Wearable Multi-Channel Pulse Signal Acquisition System Based on Flexible MEMS Sensor Arrays with TSV Structure
Micro-electro-mechanical system (MEMS) pressure sensors play a significant role in pulse wave acquisition. However, existing MEMS pulse pressure sensors bound with a flexible substrate by gold wire are vulnerable to crush fractures, leading to sensor failure. Additionally, establishing an effective...
Main Authors: | Xiaoxiao Kang, Lin Huang, Yitao Zhang, Shichang Yun, Binbin Jiao, Xin Liu, Jun Zhang, Zhiqiang Li, Haiying Zhang |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-05-01
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Series: | Biomimetics |
Subjects: | |
Online Access: | https://www.mdpi.com/2313-7673/8/2/207 |
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