Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2

Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2

Two platinum precursors, Pt(CO)2Cl2 and Pt(CO)2Br2, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments i...

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Bibliographic Details
Main Authors: Aya Mahgoub, Hang Lu, Rachel M. Thorman, Konstantin Preradovic, Titel Jurca, Lisa McElwee-White, Howard Fairbrother, Cornelis W. Hagen
Format: Article
Language:English
Published: Beilstein-Institut 2020-11-01
Series:Beilstein Journal of Nanotechnology
Subjects:
energy-dispersive x-ray spectroscopy (edx)
focused electron beam-induced deposition (febid)
nanofabrication
platinum precursors
scanning electron microscopy (sem)
thermogravimetric analysis (tga)
Online Access:https://doi.org/10.3762/bjnano.11.161

Internet

https://doi.org/10.3762/bjnano.11.161

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