Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors

Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors

For the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled duri...

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Bibliographic Details
Main Authors: Lars Thormählen, Dennis Seidler, Viktor Schell, Frans Munnik, Jeffrey McCord, Dirk Meyners
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Sensors
Subjects:
magnetron sputter deposition
FeCoSiB
ERDA
XRD
film stress
magnetic field sensor
Online Access:https://www.mdpi.com/1424-8220/21/24/8386

Internet

https://www.mdpi.com/1424-8220/21/24/8386

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