Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors
For the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled duri...
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| Format: | Article |
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MDPI AG
2021-12-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/21/24/8386 |
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| author | Lars Thormählen Dennis Seidler Viktor Schell Frans Munnik Jeffrey McCord Dirk Meyners |
| author_facet | Lars Thormählen Dennis Seidler Viktor Schell Frans Munnik Jeffrey McCord Dirk Meyners |
| author_sort | Lars Thormählen |
| collection | DOAJ |
| description | For the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled during film deposition to further control magnetic influences such as crystallographic effects, pinning effects and stress anisotropies. For the application in magnetic surface acoustic wave sensors, the magnetostrictive layers are deposited on rotated piezoelectric single crystal substrates. The thermomechanical properties of quartz can lead to undesirable layer stresses and associated magnetic anisotropies if the temperature increases during deposition. With this in mind, we compare amorphous, magnetostrictive FeCoSiB films prepared by RF and DC magnetron sputter deposition. The chemical, structural and magnetic properties determined by elastic recoil detection, X-ray diffraction, and magneto-optical magnetometry and magnetic domain analysis are correlated with the resulting surface acoustic wave sensor properties such as phase noise level and limit of detection. To confirm the material properties, SAW sensors with magnetostrictive layers deposited with RF and DC deposition have been prepared and characterized, showing comparable detection limits below 200 pT/Hz<sup>1/2</sup> at 10 Hz. The main benefit of the DC deposition is achieving higher deposition rates while maintaining similar low substrate temperatures. |
| first_indexed | 2024-03-10T03:09:05Z |
| format | Article |
| id | doaj.art-cf2d5842351f4ea8951e00865b519b0b |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T03:09:05Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-cf2d5842351f4ea8951e00865b519b0b2023-11-23T10:30:45ZengMDPI AGSensors1424-82202021-12-012124838610.3390/s21248386Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field SensorsLars Thormählen0Dennis Seidler1Viktor Schell2Frans Munnik3Jeffrey McCord4Dirk Meyners5Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, GermanyInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, GermanyInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, GermanyInstitute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR), 01328 Dresden, GermanyInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, GermanyInstitute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, GermanyFor the best possible limit of detection of any thin film-based magnetic field sensor, the functional magnetic film properties are an essential parameter. For sensors based on magnetostrictive layers, the chemical composition, morphology and intrinsic stresses of the layer have to be controlled during film deposition to further control magnetic influences such as crystallographic effects, pinning effects and stress anisotropies. For the application in magnetic surface acoustic wave sensors, the magnetostrictive layers are deposited on rotated piezoelectric single crystal substrates. The thermomechanical properties of quartz can lead to undesirable layer stresses and associated magnetic anisotropies if the temperature increases during deposition. With this in mind, we compare amorphous, magnetostrictive FeCoSiB films prepared by RF and DC magnetron sputter deposition. The chemical, structural and magnetic properties determined by elastic recoil detection, X-ray diffraction, and magneto-optical magnetometry and magnetic domain analysis are correlated with the resulting surface acoustic wave sensor properties such as phase noise level and limit of detection. To confirm the material properties, SAW sensors with magnetostrictive layers deposited with RF and DC deposition have been prepared and characterized, showing comparable detection limits below 200 pT/Hz<sup>1/2</sup> at 10 Hz. The main benefit of the DC deposition is achieving higher deposition rates while maintaining similar low substrate temperatures.https://www.mdpi.com/1424-8220/21/24/8386magnetron sputter depositionFeCoSiBERDAXRDfilm stressmagnetic field sensor |
| spellingShingle | Lars Thormählen Dennis Seidler Viktor Schell Frans Munnik Jeffrey McCord Dirk Meyners Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors Sensors magnetron sputter deposition FeCoSiB ERDA XRD film stress magnetic field sensor |
| title | Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors |
| title_full | Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors |
| title_fullStr | Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors |
| title_full_unstemmed | Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors |
| title_short | Sputter Deposited Magnetostrictive Layers for SAW Magnetic Field Sensors |
| title_sort | sputter deposited magnetostrictive layers for saw magnetic field sensors |
| topic | magnetron sputter deposition FeCoSiB ERDA XRD film stress magnetic field sensor |
| url | https://www.mdpi.com/1424-8220/21/24/8386 |
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