Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films
The present study deals with CrN films irradiated at room temperature (RT) with 200 keV Ar+ ions. The CrN layers were deposited by d.c. reactive sputtering on Si (100) wafers, at nitrogen partial pressure of 5×10-4 mbar, to a total thickness of 280 nm. The substrates were held at 150ºC duri...
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| Format: | Article |
| Language: | English |
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International Institute for the Science of Sintering, Beograd
2015-01-01
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| Series: | Science of Sintering |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/0350-820X/2015/0350-820X1502187N.pdf |
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| author | Novaković M. Popović M. Bibić N. |
| author_facet | Novaković M. Popović M. Bibić N. |
| author_sort | Novaković M. |
| collection | DOAJ |
| description | The present study deals with CrN films irradiated at room temperature (RT)
with 200 keV Ar+ ions. The CrN layers were deposited by d.c. reactive
sputtering on Si (100) wafers, at nitrogen partial pressure of 5×10-4 mbar,
to a total thickness of 280 nm. The substrates were held at 150ºC during
deposition. After deposition the CrN layers were irradiated with 200 keV Ar+
ions to the fluences of 5×1015 - 2×1016 ions/cm2. Structural characterization
was performed with Rutherford backscattering spectroscopy (RBS),
cross-sectional transmission electron microscopy (XTEM) and X-ray diffraction
(XRD). Spectroscopic ellipsometry measurements were carried out in order to
study optical properties of the samples. The irradiations caused the
microstructrual changes in CrN layers, but no amorphization even at the
highest argon fluence of 2×1016 ions/cm2. Observed changes in microstructure
were correlated with the variation in optical parameters. It was found that
both refractive index and extinction coefficient are strongly dependent on
the defect concentration in CrN layers. [Projekat Ministarstva nauke
Republike Srbije, br. III 45005] |
| first_indexed | 2024-12-22T04:22:50Z |
| format | Article |
| id | doaj.art-cf7f4d2897864f2ca2cfcd3c0779f33b |
| institution | Directory Open Access Journal |
| issn | 0350-820X 1820-7413 |
| language | English |
| last_indexed | 2024-12-22T04:22:50Z |
| publishDate | 2015-01-01 |
| publisher | International Institute for the Science of Sintering, Beograd |
| record_format | Article |
| series | Science of Sintering |
| spelling | doaj.art-cf7f4d2897864f2ca2cfcd3c0779f33b2022-12-21T18:39:13ZengInternational Institute for the Science of Sintering, BeogradScience of Sintering0350-820X1820-74132015-01-0147218719410.2298/SOS1502187N0350-820X1502187NArgon irradiation effects on the structural and optical properties of reactively sputtered CrN filmsNovaković M.0Popović M.1Bibić N.2VINČA Institute of Nuclear Sciences, BelgradeVINČA Institute of Nuclear Sciences, BelgradeVINČA Institute of Nuclear Sciences, BelgradeThe present study deals with CrN films irradiated at room temperature (RT) with 200 keV Ar+ ions. The CrN layers were deposited by d.c. reactive sputtering on Si (100) wafers, at nitrogen partial pressure of 5×10-4 mbar, to a total thickness of 280 nm. The substrates were held at 150ºC during deposition. After deposition the CrN layers were irradiated with 200 keV Ar+ ions to the fluences of 5×1015 - 2×1016 ions/cm2. Structural characterization was performed with Rutherford backscattering spectroscopy (RBS), cross-sectional transmission electron microscopy (XTEM) and X-ray diffraction (XRD). Spectroscopic ellipsometry measurements were carried out in order to study optical properties of the samples. The irradiations caused the microstructrual changes in CrN layers, but no amorphization even at the highest argon fluence of 2×1016 ions/cm2. Observed changes in microstructure were correlated with the variation in optical parameters. It was found that both refractive index and extinction coefficient are strongly dependent on the defect concentration in CrN layers. [Projekat Ministarstva nauke Republike Srbije, br. III 45005]http://www.doiserbia.nb.rs/img/doi/0350-820X/2015/0350-820X1502187N.pdfCrN filmsion irradiationTEMRBSXRDellipsometry |
| spellingShingle | Novaković M. Popović M. Bibić N. Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films Science of Sintering CrN films ion irradiation TEM RBS XRD ellipsometry |
| title | Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films |
| title_full | Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films |
| title_fullStr | Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films |
| title_full_unstemmed | Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films |
| title_short | Argon irradiation effects on the structural and optical properties of reactively sputtered CrN films |
| title_sort | argon irradiation effects on the structural and optical properties of reactively sputtered crn films |
| topic | CrN films ion irradiation TEM RBS XRD ellipsometry |
| url | http://www.doiserbia.nb.rs/img/doi/0350-820X/2015/0350-820X1502187N.pdf |
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