Influence of magnetron sputtering conditions on the structure and surface morphology of InxGa1–xAs thin films on a GaAs (100) substrate
We present the results of the study of the structure and surface morphology of InxGa1–xAs thin films on a GaAs substrate. Thin films were obtained by magnetron sputtering from a specially formed In0.45Ga0.55As target in an argon atmosphere. The obtained samples of thin films were studied by Raman s...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2022-09-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: | |
| Online Access: | https://journals.vsu.ru/kcmf/article/view/9851 |