Compact Optical System Based on Scatterometry for Off-Line and Real-Time Monitoring of Surface Micropatterning Processes

Compact Optical System Based on Scatterometry for Off-Line and Real-Time Monitoring of Surface Micropatterning Processes

In this study, a scatterometry-based monitoring system designed for tracking the quality and reproducibility of laser-textured surfaces in industrial environments was validated in off-line and real-time modes. To this end, a stainless steel plate was structured by direct laser interference patternin...

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Bibliographic Details
Main Authors: Marcos Soldera, Sascha Teutoburg-Weiss, Nikolai Schröder, Bogdan Voisiat, Andrés Fabián Lasagni
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Optics
Subjects:
laser texturing
scatterometry
direct laser interference patterning
in-line monitoring
microfabrication
diffraction gratings
Online Access:https://www.mdpi.com/2673-3269/4/1/14

Internet

https://www.mdpi.com/2673-3269/4/1/14

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