Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation

Digital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holo...

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Bibliographic Details
Main Authors: Marek Stašík, František Kaván, Marek Mach, Karolína Sedláčková
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2020-12-01
Series:Sensors & Transducers
Subjects:
Online Access:https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3191.pdf