Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
Digital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holo...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2020-12-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3191.pdf |