Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
Digital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holo...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2020-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3191.pdf |
| Summary: | Digital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holographic microscope development. The device construction is described. The research emphasises on two- wavelength interferometry combined with phase shifting. The phase shifting was done using acousto-optic modulators, which allow precise tuning of light frequency. A developed enhanced measurement procedure which increases versatility by increasing dynamic range is described. Developed algorithms for data evaluation are presented and measured experimental data visualised. |
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| ISSN: | 2306-8515 1726-5479 |