Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation

Digital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holo...

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Main Authors: Marek Stašík, František Kaván, Marek Mach, Karolína Sedláčková
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2020-12-01
Series:Sensors & Transducers
Subjects:
Online Access:https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3191.pdf
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author Marek Stašík
František Kaván
Marek Mach
Karolína Sedláčková
author_facet Marek Stašík
František Kaván
Marek Mach
Karolína Sedláčková
author_sort Marek Stašík
collection DOAJ
description Digital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holographic microscope development. The device construction is described. The research emphasises on two- wavelength interferometry combined with phase shifting. The phase shifting was done using acousto-optic modulators, which allow precise tuning of light frequency. A developed enhanced measurement procedure which increases versatility by increasing dynamic range is described. Developed algorithms for data evaluation are presented and measured experimental data visualised.
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spelling doaj.art-cfc691ec5e3548429ab596f23e4f45e42023-08-04T15:34:04ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792020-12-012478817Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm AttenuationMarek Stašík0František Kaván1Marek Mach2Karolína Sedláčková3Technical University of Liberec, Institute of New Technologies and Applied InformaticsTechnical University of Liberec, Institute of New Technologies and Applied InformaticsRegional Centre for Special Optics and Optoelectronic Systems (TOPTEC), Institute of Plasma Physics, Academy of Sciences of the Czech RepublicTechnical University of Liberec, Institute of New Technologies and Applied InformaticsDigital holographic microscopy is a powerful 3D imaging tool for industrial surface inspection and scientific experiment evaluation, as it provides lateral resolution similar to classical microscopy and very fine axial resolution. This paper presents the results and the findings of experimental holographic microscope development. The device construction is described. The research emphasises on two- wavelength interferometry combined with phase shifting. The phase shifting was done using acousto-optic modulators, which allow precise tuning of light frequency. A developed enhanced measurement procedure which increases versatility by increasing dynamic range is described. Developed algorithms for data evaluation are presented and measured experimental data visualised.https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3191.pdfmicroscopeinterferometryphase shiftingbragg cellacousto-optic modulatormultiwavelength interferometryhigh dynamic range
spellingShingle Marek Stašík
František Kaván
Marek Mach
Karolína Sedláčková
Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
Sensors & Transducers
microscope
interferometry
phase shifting
bragg cell
acousto-optic modulator
multiwavelength interferometry
high dynamic range
title Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
title_full Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
title_fullStr Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
title_full_unstemmed Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
title_short Advanced Measurement Procedure for Interferometric Microscope for Three-dimensional Imaging of Complex Surfaces Using Two-wavelength Interferometry and Reference Arm Attenuation
title_sort advanced measurement procedure for interferometric microscope for three dimensional imaging of complex surfaces using two wavelength interferometry and reference arm attenuation
topic microscope
interferometry
phase shifting
bragg cell
acousto-optic modulator
multiwavelength interferometry
high dynamic range
url https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3191.pdf
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