Nanofabrication Process Scale-Up via Displacement Talbot Lithography of a Plasmonic Metasurface for Sensing Applications

Nanofabrication Process Scale-Up via Displacement Talbot Lithography of a Plasmonic Metasurface for Sensing Applications

The selection of an affordable method to fabricate plasmonic metasurfaces needs to guarantee complex control over both tunability and reproducibility of their spectral and morphological properties, making plasmonic metasurfaces suitable for integration into different sensing devices. Displacement Ta...

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Bibliographic Details
Main Authors: Paola Pellacani, Konstantins Jefimovs, Margherita Angelini, Franco Marabelli, Valentina Tolardo, Dimitrios Kazazis, Francesco Floris
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Optics
Subjects:
plasmonic metasurface
lithographic techniques
optical (bio)sensing
Online Access:https://www.mdpi.com/2673-3269/5/1/12

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https://www.mdpi.com/2673-3269/5/1/12

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