In situ observation of medium range ordering and crystallization of amorphous TiO2 ultrathin films grown by atomic layer deposition
The evolution of medium range ordering (MRO) and crystallization behavior of amorphous TiO2 films grown by atomic layer deposition (ALD) were studied using in situ four-dimensional scanning transmission electron microscopy. The films remain fully amorphous when grown at 120 °C or below, but they sta...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-01-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0130918 |