Ionization Gas Sensor Using Suspended Carbon Nanotube Beams
An ionization sensor based on suspended carbon nanotubes (CNTs) was presented. A suspended CNT beam was fabricated by a low-temperature surface micromachining process using SU8 photoresist as the sacrificial layer. Application of a bias to the CNT beam generated very high non-linear electric fields...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-03-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/20/6/1660 |