Ionization Gas Sensor Using Suspended Carbon Nanotube Beams

Ionization Gas Sensor Using Suspended Carbon Nanotube Beams

An ionization sensor based on suspended carbon nanotubes (CNTs) was presented. A suspended CNT beam was fabricated by a low-temperature surface micromachining process using SU8 photoresist as the sacrificial layer. Application of a bias to the CNT beam generated very high non-linear electric fields...

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Bibliographic Details
Main Authors: Shivaram Arunachalam, Ricardo Izquierdo, Frederic Nabki
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Sensors
Subjects:
suspended
carbon nanotubes
ionization
Online Access:https://www.mdpi.com/1424-8220/20/6/1660

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